Jörg Butschke

Title: Innovations of Jörg Butschke: A Trailblazer in Particle-Beam Processing

Introduction

Jörg Butschke is a prolific inventor based in Stuttgart, Germany, known for his substantial contributions to the field of particle-beam processing. With a total of two patents to his name, Butschke's innovations serve pivotal roles in advancing technology and enhancing efficiency within various applications.

Latest Patents

Jörg Butschke's most recent patents include the "Multi-beam deflector array device for maskless particle-beam processing" and a "Method of producing large-area membrane masks by dry etching". The multi-beam deflector array device is designed for use in particle-beam exposure apparatuses utilizing a beam of charged particles. This invention features a plate-like shape with a membrane region that includes an array of apertures, allowing the passage of beamlets formed from the main particle beam. Moreover, it includes a sophisticated electrodynamic mechanism that enables the realization of both non-deflecting and deflecting states for the particles.

The latter patent regarding membrane masks addresses the irregularities encountered during dry etching processes. By introducing alternative steps to compensate for etching irregularities, Butschke ensured a homogeneous etching removal across the entire surface of the wafer, thereby enhancing fabrication precision.

Career Highlights

Throughout his career, Jörg Butschke has worked with notable organizations such as Ims Nanofabrication AG and the Institut für Mikroelektronik. His tenure at these institutions allowed him to refine his skills and explore advanced methodologies that would ultimately lead to his innovative patents.

Collaborations

In his professional journey, Butschke has collaborated with accomplished peers including Reinhard Springer and Florian Letzkus. These partnerships have not only enriched his experiences but have also contributed to the collective advancement of their respective fields.

Conclusion

Jörg Butschke's contributions to the realm of particle-beam processing through his innovative patents underscore his role as a visionary inventor. His work not only pushes the boundaries of existing technology but also paves the way for future advancements. As he continues to explore new frontiers in his field, the impact of his inventions will likely be felt across various technological sectors for years to come.