The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Feb. 27, 2008
Elmar Platzgummer, Vienna, AT;
Hans Löschner, Vienna, AT;
Samuel Kvasnica, Vienna, AT;
Reinhard Springer, Suiz am Neckar, DE;
Mathias Irmscher, Renningen, DE;
Florian Letzkus, Tübingen, DE;
Jörg Butschke, Stuttgart, DE;
Elmar Platzgummer, Vienna, AT;
Hans Löschner, Vienna, AT;
Samuel Kvasnica, Vienna, AT;
Reinhard Springer, Suiz am Neckar, DE;
Mathias Irmscher, Renningen, DE;
Florian Letzkus, Tübingen, DE;
Jörg Butschke, Stuttgart, DE;
IMS Nanofabrication AG, Vienna, AT;
Institut fur Mikroelektronik, Stuttgart, DE;
Abstract
The invention relates to a multi-beam deflector array device for use in a particle-beam exposure apparatus employing a beam of charged particles, the multi-beam deflector array device having a plate-like shape with a membrane region, the membrane region including a first side facing towards the incoming beam of particles, an array of apertures, each aperture allowing passage of a corresponding beamlet formed out of the beam of particles, a plurality of depressions, each depression being associated with at least one aperture, and an array of electrodes, each aperture being associated with at least one electrode and each electrode being located in a depression, the electrodes being configured to realize a non-deflecting state, wherein the particles that pass through the apertures are allowed to travel along a desired path, and a deflecting state, wherein the particles are deflected off the desired path.