This inventor holds 13 USPTO granted patents and 1 EPO patent. Top assignee: Kla Tencor Corporation. Active years: 2015-2019.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2015-2019
Title: The Innovations of Justin Dianhuan Liou: A Pioneer in Optical Inspection Systems
Introduction
Justin Dianhuan Liou, based in Santa Clara, CA, is an accomplished inventor with a remarkable portfolio of 13 patents. His innovative contributions primarily focus on advancements in optical inspection and metrology systems, which have played a significant role in semiconductor manufacturing and quality control.
Latest Patents
Among his latest patents, Liou's work on the "193nm Laser and Inspection System" stands out. This optical inspection system employs a sub-200 nm incident light beam to examine the surfaces of objects for defects. The technology integrates two different light wavelengths, approximately 1109 nm and 234 nm, to create the necessary incident light. The optical setup directs this light toward the object's surface and includes sophisticated image relay optics that capture both reflected and transmitted light, allowing for simultaneous detection by a sensor.
Another notable patent is the "Semiconductor Inspection and Metrology System Using Laser Pulse Multiplier." This pulse multiplier features a polarizing beam splitter, a wave plate, and multi-surface reflecting components like etalons and mirrors. The system enhances the input laser pulse frequency, achieving an output that is at least double that of the input, thereby improving overall inspection capabilities.
Career Highlights
Justin has made significant contributions to industry leaders, including Kla Tencor Corporation, where he applied his expertise in developing high-precision optical tools. His innovative designs have improved manufacturing processes, making them more efficient and reliable.
Collaborations
Throughout his career, Liou has collaborated with renowned professionals, including Yung-Ho Alex Chuang and J. Joseph Armstrong. Their teamwork has led to advancements in laser technology and optical systems, contributing to the field's rapid evolution.
Conclusion
Justin Dianhuan Liou’s inventive spirit and commitment to excellence have established him as a notable figure in the realm of optical inspection systems. His patents reflect a deep understanding of complex technologies, and his work continues to influence the semiconductor industry significantly.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile