The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 07, 2018

Filed:

Aug. 17, 2016
Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Yung-Ho Alex Chuang, Cupertino, CA (US);

Xiaoxu Lu, San Jose, CA (US);

Justin Dianhuan Liou, Santa Clara, CA (US);

J. Joseph Armstrong, Fremont, CA (US);

Yujun Deng, San Jose, CA (US);

John Fielden, Los Altos, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/10 (2006.01); H01S 3/00 (2006.01); H01S 3/08 (2006.01); H01S 3/083 (2006.01);
U.S. Cl.
CPC ...
H01S 3/10046 (2013.01); H01S 3/005 (2013.01); H01S 3/083 (2013.01); H01S 3/08004 (2013.01); H01S 3/08054 (2013.01); H01S 3/08059 (2013.01); H01S 3/10061 (2013.01); H01S 3/0071 (2013.01); H01S 3/10 (2013.01); H01S 2301/20 (2013.01); H01S 2301/203 (2013.01); H01S 2301/206 (2013.01);
Abstract

A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.


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