Company Filing History:
Years Active: 2016-2019
Title: Innovations of Xiaoxu Lu in Laser Technology
Introduction
Xiaoxu Lu is a prominent inventor based in San Jose, CA, known for his significant contributions to laser technology. With a total of 9 patents to his name, Lu has made remarkable advancements in the field, particularly in the development of continuous wave (CW) laser systems.
Latest Patents
One of Lu's latest patents is the "183 nm CW laser and inspection system." This innovative system utilizes first optics to direct continuous wave light at wavelengths between 181 nm and 185 nm towards an inspected article. The second optics then redirect the image information affected by the article to detectors. The laser assembly generates the CW light by producing fourth harmonic light from first fundamental CW light, which has a wavelength between 1 and 1.1 μm. This process involves generating fifth harmonic light by mixing the fourth harmonic light with the first fundamental CW light, and subsequently mixing the fifth harmonic light with second light that has a wavelength between 1.26 and 1.82 μm. An external cavity is employed to mix the first light and the fourth harmonic light using a first nonlinear crystal. The CW light is generated through a second cavity that circulates second fundamental or signal CW light through a second nonlinear crystal, directing the fifth harmonic light through it as well.
Career Highlights
Xiaoxu Lu is currently employed at Kla Tencor Corporation, where he continues to push the boundaries of laser technology. His work has been instrumental in enhancing the capabilities of inspection systems, making them more efficient and effective.
Collaborations
Lu has collaborated with notable colleagues, including Yung-Ho Alex Chuang and John Fielden, contributing to a dynamic and innovative work environment.
Conclusion
Xiaoxu Lu's contributions to laser technology, particularly through his recent patents, highlight his role as a leading inventor in the field. His work at Kla Tencor Corporation continues to influence advancements in inspection systems and laser applications.
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