The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2018
Filed:
Nov. 04, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Yung-Ho Chuang, Cupertino, CA (US);
J. Joseph Armstrong, Fremont, CA (US);
Yujun Deng, San Jose, CA (US);
Justin Dianhuan Liou, Santa Clara, CA (US);
Vladimir Dribinski, Livermore, CA (US);
John Fielden, Los Altos, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An improved solid-state laser for generating sub-200 nm light is described. This laser uses a fundamental wavelength between about 1030 nm and 1065 nm to generate the sub-200 nm light. The final frequency conversion stage of the laser creates the sub-200 nm light by mixing a wavelength of approximately 1109 nm with a wavelength of approximately 234 nm. By proper selection of non-linear media, such mixing can be achieved by nearly non-critical phase matching. This mixing results in high conversion efficiency, good stability, and high reliability.