The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2017
Filed:
Jun. 01, 2012
Yung-ho Chuang, Cupertino, CA (US);
J. Joseph Armstrong, Fremont, CA (US);
Justin Dianhuan Liou, Santa Clara, CA (US);
Vladimir Dribinski, Livermore, CA (US);
David L. Brown, Los Gatos, CA (US);
Yung-Ho Chuang, Cupertino, CA (US);
J. Joseph Armstrong, Fremont, CA (US);
Justin Dianhuan Liou, Santa Clara, CA (US);
Vladimir Dribinski, Livermore, CA (US);
David L. Brown, Los Gatos, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A pulse multiplier includes a polarizing beam splitter, a wave plate, and a set of mirrors. The polarizing beam splitter receives an input laser pulse. The wave plate receives light from the polarized beam splitter and generates a first set of pulses and a second set of pulses. The first set of pulses has a different polarization than the second set of pulses. The polarizing beam splitter, the wave plate, and the set of mirrors create a ring cavity. The polarizing beam splitter transmits the first set of pulses as an output of the pulse multiplier and reflects the second set of pulses into the ring cavity. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.