Jung-Wu Chien

Title: Innovations of Jung-Wu Chien

Introduction

Jung-Wu Chien is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the manufacturing of dynamic random access memory (DRAM). With a total of six patents to his name, Chien's work has had a substantial impact on the industry.

Latest Patents

One of his latest patents is a manufacturing method of dynamic random access memory. This method involves providing a substrate where a patterned first mask layer and deep trenches are formed. Deep trench capacitors are created within these trenches, each consisting of a lower electrode, an upper electrode, and a capacitor dielectric layer. A device isolation layer is then formed to define an active region. Following the removal of the first mask layer, a semiconductor layer is formed on the exposed substrate. The semiconductor layer and substrate are patterned to create trenches, with the bottom of the trench adjacent to the upper electrodes of the trench capacitor. Additionally, gate structures are formed within the trenches, and a doped region is created in the substrate adjacent to the gate structure.

Another notable patent involves a method for fabricating a gate structure. This process includes the sequential formation of a pad oxide layer, a pad conductive layer, and a dielectric layer over a substrate. An opening is created in the dielectric layer to expose part of the pad conductive layer. A liner conductive layer is then formed to cover both the dielectric and pad conductive layers. Portions of these layers are removed to create a conductive spacer, followed by the removal of the pad oxide layer and the formation of a gate oxide layer. Finally, two gate conductive layers are formed over the gate oxide layer, completing the gate structure.

Career Highlights

Jung-Wu Chien has established himself as a key figure in the semiconductor industry through his innovative patents and methods. His work at Promos Technologies, Inc. has allowed him to collaborate with other experts in the field, further enhancing his contributions to technology.

Collaborations

Chien has worked alongside his coworker, Chao-Hsi Chung, to advance their research and development efforts in semiconductor technology.

Conclusion

Jung-Wu Chien's innovative work in the field of semiconductor technology, particularly in DRAM manufacturing, showcases his expertise and dedication to advancing the industry. His contributions through his patents continue to influence the