The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Feb. 02, 2007
Jung-wu Chien, Hsinchu, TW;
Jung-Wu Chien, Hsinchu, TW;
ProMOS Technologies Inc., Hsinchu, TW;
Abstract
A method for fabricating a gate structure is provided. A pad oxide layer, a pad conductive layer and a dielectric layer are sequentially formed over a substrate. A portion of the dielectric layer is removed to form an opening exposing a portion of the pad conductive layer. A liner conductive layer is formed to cover the dielectric layer and the pad conductive layer. A portion of the liner conductive layer and a portion of the pad conductive layer are removed to expose a surface of the pad oxide layer to form a conductive spacer. The pad oxide layer is removed and a gate oxide layer is formed over the substrate. A first gate conductive layer and a second gate conductive layer are sequentially formed over the gate oxide layer. A portion of the gate oxide layer is removed and a cap layer to fill the opening.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile