Company Filing History:
Years Active: 2014-2019
Title: Jung-soo Yoon: Innovator in Substrate Processing Technology
Introduction
Jung-soo Yoon is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of substrate processing technology, holding a total of 3 patents. His work primarily focuses on enhancing the efficiency and reliability of substrate treatment processes.
Latest Patents
One of Jung-soo Yoon's latest patents is a substrate processing apparatus. This apparatus comprises a process chamber that provides an inner space for substrate treatment, a support unit that holds the substrate, and a gas supply unit that delivers the necessary process gas for plasma generation. The support unit features a base with a top surface for substrate placement, a heater integrated into the base, and a coating layer on the top surface.
Another notable patent is the plasma-enhanced chemical vapor deposition (PE-CVD) apparatus and method of operating the same. This deposition apparatus includes a chuck within a process chamber, where the chuck has a top surface for substrate loading. A showerhead is positioned above the chuck, and a fence extension is included in the process chamber. During the deposition process, plasma is generated in the space between the showerhead and the substrate, with the fence extension helping to confine the plasma, thus improving the uniformity and reliability of the deposited layer.
Career Highlights
Jung-soo Yoon is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in substrate processing technologies. His work has been instrumental in advancing the capabilities of semiconductor manufacturing processes.
Collaborations
Jung-soo Yoon collaborates with talented individuals such as Minjong Kim and Jongwon Hong, contributing to a dynamic and innovative work environment.
Conclusion
Jung-soo Yoon's contributions to substrate processing technology through his patents and work at Samsung Electronics Co., Ltd. highlight his role as a key innovator in the field. His advancements are paving the way for improved manufacturing processes in the semiconductor industry.