Jung Hoon Oh

Title: Innovations of Jung Hoon Oh in Photoacid Generators

Introduction

Jung Hoon Oh is a notable inventor based in Chungcheongnam-do, South Korea. He has made significant contributions to the field of photoacid generators, which are essential in the lithography process used in semiconductor manufacturing. With a total of 4 patents to his name, his work has garnered attention for its innovative approaches and practical applications.

Latest Patents

Jung Hoon Oh's latest patents include a photoacid generator, a method for producing the same, and a resist composition comprising the photoacid generator. The photoacid generator is represented by a specific formula, which allows it to maintain an appropriate contact angle during ArF liquid immersion lithography. This innovation reduces defects that may occur during the lithography process and demonstrates excellent solubility in resist solvents, along with compatibility with various resins. Additionally, the production method for this photoacid generator is efficient and utilizes an epoxy compound that is readily available in the industry.

Another significant patent involves a sulfonium compound that serves as a photoacid generator. This compound is characterized by its controllable photon yield, which can be adjusted by introducing different absorbers to the cation region within a single molecule. This innovation addresses the challenges associated with using a mixture of different photoacid generators, enhancing the miscibility in resist and improving resolution and line edge roughness.

Career Highlights

Jung Hoon Oh is currently employed at Korea Kumho Petrochemical Co., Ltd., where he continues to develop and refine his inventions. His work has been instrumental in advancing the technology used in the semiconductor industry, particularly in the area of lithography.

Collaborations

Some of his notable coworkers include Dae Kyung Yoon and Seung Duk Cho, who have collaborated with him on various projects related to photoacid generators and resist compositions.

Conclusion

Jung Hoon Oh's contributions to the field of photoacid generators reflect his innovative spirit and dedication to advancing technology in semiconductor manufacturing. His patents not only address existing challenges but also pave the way for future developments in the industry.