Jun Wu

Title: Innovator Jun Wu: Pioneering Advances in Semiconductor Technology

Introduction: Jun Wu, an accomplished inventor based in Taoyuan County, Taiwan, has made significant contributions to the field of semiconductor technology. With a total of six patents to his name, he exemplifies the spirit of innovation that drives advancements in electronic components.

Latest Patents: Among Jun Wu's notable inventions is a groundbreaking method for minimizing copper hillock defects. This innovative process involves fabricating a copper interconnect on a substrate by subjecting both the interconnect and substrate to a low-temperature anneal after polarization and before applying a dielectric layer. By inhibiting hillock formation in copper during subsequent high-temperature processes, this method effectively prevents shorts in semiconductor connections, enhancing the reliability of devices. For instance, the interconnect and substrate can be annealed at approximately 200° C for about 180 seconds in a forming gas environment consisting of 5% hydrogen and 95% nitrogen.

Additionally, Wu has developed a method for smoothening dielectric layers, which involves forming a dielectric layer on a semiconductor substrate and applying a plasma treatment with a silane-based gas and a nitrogen-based gas. This innovative approach results in a more uniform dielectric layer, which is crucial for the performance of semiconductor devices.

Career Highlights: Jun Wu is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leader in the semiconductor industry known for its advanced manufacturing processes. His role at the company allows him to contribute to cutting-edge research and development efforts that push the boundaries of semiconductor technology.

Collaborations: Throughout his career, Jun Wu has collaborated with esteemed colleagues, including Ying-Lang Wang and Wen-Long Lee. These partnerships have fostered innovation and driven the successful development of new technologies within the semiconductor field.

Conclusion: Jun Wu's work demonstrates the importance of innovation in the semiconductor industry. His patents not only address critical challenges but also pave the way for future advancements. As technology continues to evolve, inventors like Jun Wu will remain at the forefront, shaping the future of electronics.