Company Filing History:
Years Active: 2016-2018
Title: Inventor Juergen Mueller: Innovating in Mirror Technology
Introduction
Juergen Mueller, an inventive mind based in Ulm, Germany, has made significant contributions to the field of optics. With a total of three patents to his name, Mueller's work focuses on technologies crucial for advanced lithography applications, particularly in the extreme ultraviolet (EUV) range.
Latest Patents
Mueller's latest innovations include a patent for a mirror designed specifically for EUV lithography. This mirror comprises a substrate and a reflective coating made up of two groups of layers. These layers efficiently reflect radiation in the wavelength range between 5 nm and 30 nm. Importantly, a decoupling coating is placed between these two groups of layers, preventing the radiation from reaching the first group and thereby enhancing performance. Another notable invention is a method for correcting the surface form of mirrors that utilize alternating layers with different refractive indices to optimize reflection quality at operating wavelengths.
Career Highlights
Mueller is currently employed at Carl Zeiss SMT GmbH, a company renowned for its state-of-the-art optical and lithographic systems. His role there allows him to work at the forefront of technology development, particularly in applications that demand precise optical properties. The advancements he has championed in mirror technology are essential for the continued evolution of lithography methods used in semiconductor manufacturing.
Collaborations
Throughout his career, Mueller has collaborated with esteemed colleagues, including Dirk Heinrich Ehm and Franz-Josef Stickel. These professional partnerships illustrate the collaborative nature of innovation in optics and the impact of teamwork on advancing technological progress.
Conclusion
Juergen Mueller's contributions underline the importance of innovative thinking in the field of optics. His work on mirror technologies not only advances understanding but also enhances practical applications in high-precision industries, such as semiconductor fabrication. As he continues to innovate, the influence of his inventions will undoubtedly resonate throughout the field for years to come.