The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Sep. 13, 2013
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/32 (2006.01); G02B 5/08 (2006.01); G02B 27/00 (2006.01); G03F 7/20 (2006.01); G21K 1/06 (2006.01); B82Y 10/00 (2011.01);
U.S. Cl.
CPC ...
G02B 5/0816 (2013.01); B82Y 10/00 (2013.01); G02B 5/0891 (2013.01); G02B 27/0025 (2013.01); G03F 7/70191 (2013.01); G03F 7/70233 (2013.01); G03F 7/70308 (2013.01); G03F 7/70958 (2013.01); G21K 1/062 (2013.01);
Abstract
A method for correcting a surface form of a mirror () for reflecting radiation in the wavelength range of 5-30 nm, which includes: The first group () of layers includes first () and second () layers arranged alternately one above another, wherein the first layers have a refractive index at the operating wavelength which is greater than the refractive index of the second layers for that radiation. The correction layer () is applied by: