Livermore, CA, United States of America

John Michael Kerns

USPTO Granted Patents = 6 

Average Co-Inventor Count = 8.4

ph-index = 3

Forward Citations = 31(Granted Patents)


Company Filing History:


Years Active: 2015-2025

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6 patents (USPTO):Explore Patents

Title: John Michael Kerns: Innovator in Plasma Processing Technology

Introduction

John Michael Kerns is a notable inventor based in Livermore, California, recognized for his contributions to the field of plasma processing technology. With six patents to his name, Kerns has made significant advancements that enhance the efficiency and accuracy of contamination measurement.

Latest Patents

Among his latest patents, Kerns has developed a method and apparatus for measuring particles. This innovative apparatus is designed to assess contamination on critical surfaces of various parts. It includes a vessel for mounting the part and is connected to an inert gas source that provides a consistent inert environment. At least one diffuser delivers the inert gas to ensure that the critical surface remains uncontaminated while measurements are taken. Additionally, he holds a patent for a single crystal metal oxide plasma chamber component, which features at least one plasma-facing surface made from a single crystal metal oxide material. This component can significantly enhance the performance of plasma processing chambers by utilizing materials such as spinel, yttrium oxide, and yttrium aluminum garnet (YAG).

Career Highlights

Kerns currently works at Lam Research Corporation, a leader in the semiconductor manufacturing equipment industry. His innovative spirit and dedication to advancing technology have positioned him as a valuable asset within the company, contributing to improved manufacturing processes.

Collaborations

Throughout his career, Kerns has collaborated with fellow innovators, including Lin Xu and John Edward Daugherty. These partnerships have allowed him to share insights and drive forward-thinking initiatives in the technology landscape.

Conclusion

John Michael Kerns stands out as a visionary inventor whose work continues to shape the future of plasma processing technology. With his cutting-edge patents and collaborative efforts, he provides critical advancements that help tackle the challenges faced in contamination measurement and material performance for semiconductor manufacturing.

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