The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Mar. 12, 2013
Lam Research Corporation, Fremont, CA (US);
John Daugherty, Fremont, CA (US);
Hong Shih, Walnut, CA (US);
Lin Xu, Katy, TX (US);
Anthony Amadio, Mountain View, CA (US);
Robert G. O'Neill, Fremont, CA (US);
Peter Holland, Pleasanton, CA (US);
Sivakami Ramanathan, Fremont, CA (US);
Tae Won Kim, Dublin, CA (US);
Duane Outka, Fremont, CA (US);
John Michael Kerns, Livermore, CA (US);
Sonia Castillo, Hayward, CA (US);
LAM RESEARCH CORPORATION, Fremont, CA (US);
Abstract
Components of semiconductor material processing chambers are disclosed, which may include a substrate and at least one corrosion-resistant coating formed on a surface thereof. The at least one corrosion-resistant coating is a high purity metal coating formed by a cold-spray technique. An anodized layer can be formed on the high purity metal coating. The anodized layer comprises a process-exposed surface of the component. Semiconductor material processing apparatuses including one or more of the components are also disclosed, the components being selected from the group consisting of a chamber liner, an electrostatic chuck, a focus ring, a chamber wall, an edge ring, a plasma confinement ring, a substrate support, a baffle, a gas distribution plate, a gas distribution ring, a gas nozzle, a heating element, a plasma screen, a transport mechanism, a gas supply system, a lift mechanism, a load lock, a door mechanism, a robotic arm and a fastener. Methods of making the components and methods of plasma processing using the components are also disclosed.