Jo-Fei Wang

Title: Jo-Fei Wang: Innovator in Semiconductor Technology

Introduction

Jo-Fei Wang is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of six patents. His work focuses on improving processes and systems related to ion implantation and critical dimension control in semiconductor manufacturing.

Latest Patents

One of Jo-Fei Wang's latest patents is titled "System and method for controlling ion implanter." This invention discloses a system, method, and a non-transitory computer-readable storage medium for controlling an ion implanter. The system includes a sample module that generates a summarized value from process data of the ion implanter, which corresponds to a control parameter. The control module tunes this control parameter and performs ion implantation by releasing tools of the ion implanter when the summarized value meets a predetermined stability requirement.

Another notable patent is "Multi-zone temperature control for semiconductor wafer." This invention provides an apparatus and method for controlling the critical dimension (CD) of a circuit. The apparatus includes a controller that receives CD measurements at various locations in a circuit pattern on an etched film. A single wafer chamber is responsive to signals from the controller to locally adjust the thickness of a second film based on the measured CDs. This method enhances the precision of semiconductor manufacturing processes.

Career Highlights

Jo-Fei Wang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to develop innovative solutions that address critical challenges in semiconductor fabrication.

Collaborations

Throughout his career, Jo-Fei Wang has collaborated with notable colleagues, including Jong-I Mou and Tsun-Ching Lin. These collaborations have contributed to advancements in semiconductor technology and have fostered a productive research environment.

Conclusion

Jo-Fei Wang's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as an influential inventor in the field. His innovative approaches continue to shape the future of semiconductor manufacturing.