Company Filing History:
Years Active: 1999-2000
Title: Innovations of Jian-Hui Ye in Microelectronics
Introduction
Jian-Hui Ye is a notable inventor based in Singapore, recognized for his contributions to the field of microelectronics. He holds a total of 3 patents that showcase his innovative approaches to solving complex problems in semiconductor manufacturing.
Latest Patents
One of Jian-Hui Ye's latest patents is titled "Aqueous surfactant solution method for stripping metal plasma etch." This method involves forming a patterned metal layer within a microelectronics fabrication process. The process begins with a substrate where a blanket metal layer is formed. A patterned photoresist layer is then applied, followed by etching the blanket metal layer using a plasma etch method. The resulting patterned metal layer has a metal impregnated carbonaceous polymer residue layer on its sidewall. The method concludes with the removal of the patterned photoresist layer and the oxidized metal impregnated polymer residue layer using an aqueous alkyl ammonium hydroxide based solution that includes a surfactant.
Another significant patent by Jian-Hui Ye is "Photoresist and polymer removal by UV laser aqueous oxidant." This method focuses on stripping photoresist and polymer from a wafer after a dry etch of a nitrade or polysilicon layer. The process involves immersing the wafer in a peroxydisulfate (S.sub.2 O.sub.8.sup.2-)/HCl wet bath while irradiating it with a UV laser. This innovative approach effectively removes the photoresist and polymer layers from the semiconductor structure.
Career Highlights
Jian-Hui Ye is currently employed at Chartered Semiconductor Manufacturing Ltd, where he continues to develop and refine his innovative techniques in semiconductor fabrication. His work has significantly impacted the efficiency and effectiveness of microelectronics manufacturing processes.
Collaborations
Throughout his career, Jian-Hui Ye has collaborated with esteemed colleagues such as Mei-Sheng Zhou and Yuan-Ping Lee. These collaborations have fostered a productive environment for innovation and advancement in the field.
Conclusion
Jian-Hui Ye's contributions to microelectronics through his patents and collaborative efforts highlight his role as a key innovator in the industry. His work continues to influence the future of semiconductor manufacturing.