Jia-Rui Hu

Title: Innovations of Jia-Rui Hu in Semiconductor Technology

Introduction

Jia-Rui Hu is a prominent inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on methods for defect extraction in semiconductor manufacturing, which is crucial for enhancing the quality and reliability of electronic devices.

Latest Patents

One of his latest patents is titled "Method of extracting defects." This method provides a design layout that includes a pattern of features. The design layout is transferred onto a semiconductor substrate using a mask. A scanning parameter is determined based on the design layout, and an image of the substrate is generated using this parameter. A substrate defect is identified by comparing a first number of closed curves in a region of the image with a second number of polygons in a corresponding region of the design layout.

Another notable patent is "Method and apparatus for extracting systematic defects." This disclosure outlines a method for systematic defect extraction. Primary and secondary areas are defined in a wafer layout. A plurality of defects is identified through a first wafer inspection for an outside-process-window wafer. Defects located in the secondary area are removed, along with defects associated with non-critical semiconductor features via a grouping process. Sensitive regions are defined around defects associated with critical semiconductor features, followed by a second inspection on these regions for an inside-process-window wafer. This process helps in identifying potentially systematic defects, which are then analyzed using Scanning Electron Microscopy (SEM) to determine their validity.

Career Highlights

Jia-Rui Hu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise in defect extraction methods has positioned him as a valuable asset in the field, contributing to advancements in semiconductor manufacturing processes.

Collaborations

He has collaborated with notable colleagues such as Chih-Ming Ke and Hua-Tai Lin, further enhancing the innovative efforts within his team.

Conclusion

Jia-Rui Hu's contributions to semiconductor technology through his innovative patents demonstrate his commitment to improving manufacturing processes. His work not only advances the field but also plays a vital role in the development of reliable electronic devices.