Jeff Tobin

Title: Jeff Tobin: Innovator in Substrate Passivation Technologies

Introduction

Jeff Tobin is a prominent inventor based in Mountain View, CA (US). He holds a total of 10 patents that showcase his contributions to the field of substrate passivation technologies. His work has significantly impacted the semiconductor industry, particularly in enhancing the performance and reliability of electronic devices.

Latest Patents

Among his latest patents, one notable invention is the "Apparatus and methods for backside passivation." This patent provides innovative apparatus and methods for backside passivation of a substrate. The systems comprise an elongate support with an open top surface forming a support ring, creating a cavity when a substrate is placed on the support ring. A plasma generator is coupled to the cavity to generate plasma within the cavity, allowing for the deposition of a passivation film on the backside of the substrate.

Another significant patent is the "Sequential deposition/anneal film densification method." This method involves forming a silicon dioxide-based dielectric layer on a substrate surface through a sequential deposition/anneal technique. The deposited layer thickness is designed to allow for the complete penetration of annealing process agents into the layer, facilitating the migration of water out of the layer. The dielectric layer is then annealed at a moderate temperature to remove water and fully densify the film. This process is repeated until the desired dielectric film thickness is achieved.

Career Highlights

Jeff Tobin has had a successful career, working with notable companies such as Novellus Systems Incorporated and Applied Materials, Inc. His experience in these organizations has allowed him to develop and refine his innovative technologies, contributing to advancements in the semiconductor field.

Collaborations

Throughout his career, Jeff has collaborated with talented individuals, including Raihan M Tarafdar and George D Papasouliotis. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Jeff Tobin's contributions to substrate passivation technologies have made a significant impact on the semiconductor industry. His innovative patents and collaborations with industry professionals highlight his dedication to advancing technology. His work continues to influence the development of reliable electronic devices.