Jang Won Seo

Title: Innovations by Jang Won Seo in Polishing Pad Technology

Introduction

Jang Won Seo is a notable inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of polishing pad technology, holding 10 patents that enhance the quality and efficiency of semiconductor device manufacturing.

Latest Patents

One of his latest patents is titled "Polishing pad with adjusted crosslinking degree and process for preparing the same." This invention features a multifunctional low-molecular-weight compound as one of the polymerization units of the polyurethane-based resin that constitutes the polishing layer. This innovation reduces the unreacted diisocyanate monomer during production, enhancing processability and quality while increasing crosslinking density. The polishing pad is particularly applicable in the preparation of semiconductor devices, including a chemical mechanical polishing (CMP) process, ensuring the production of high-quality wafers.

Another significant patent is "Polishing pad, method for manufacturing polishing pad, and polishing method applying polishing pad." This invention includes a polyurethane that features a silane repeating unit in its main chain. The result is a polishing pad that minimizes defects on a substrate after polishing with a fumed silica slurry, achieving about 40 defects or less.

Career Highlights

Jang Won Seo is currently associated with Enpulse Co., Ltd., where he continues to innovate in the field of polishing technology. His work has been instrumental in advancing the capabilities of polishing pads used in semiconductor manufacturing.

Collaborations

He collaborates with talented coworkers, including Jong Wook Yun and Jaein Ahn, contributing to a dynamic team focused on innovation and quality in their products.

Conclusion

Jang Won Seo's contributions to polishing pad technology reflect his commitment to enhancing semiconductor manufacturing processes. His patents demonstrate a blend of innovation and practical application, solidifying his role as a key inventor in this field.