The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Apr. 19, 2023
Enpulse Co., Ltd., Chungcheongnam-Do, KR;
Jong Wook Yun, Gyeonggi-do, KR;
Jang Won Seo, Gyeonggi-do, KR;
Su Young Moon, Gyeonggi-do, KR;
Kyung Hwan Kim, Gyeonggi-do, KR;
Tae Kyoung Kwon, Gyeonggi-do, KR;
ENPULSE CO., LTD., Chungcheongnam-do, KR;
Abstract
A conditioning device includes: an ejector for ejecting steam to a rotating polishing pad; and an ejector support supporting the ejector. The ejector includes a plurality of nozzles for ejecting the steam to the polishing pad and a nozzle heater for heating the plurality of nozzles. The nozzle heater is configured to heat nozzles disposed to correspond to a peripheral region of the polishing pad, among the plurality of nozzles, to a higher temperature than nozzles disposed to correspond to a central region of the polishing pad among the plurality of nozzles.