Location History:
- Mesa, AZ (US) (2014 - 2015)
- Fountain Hill, AZ (US) (2021)
Company Filing History:
2 out of 3,186 
1 out of 198 
Years Active: 2014-2021
Title: Innovations of James Matthew Henry in Chemical Mechanical Planarization
Introduction
James Matthew Henry is a notable inventor based in Mesa, AZ (US), recognized for his contributions to the field of chemical mechanical planarization (CMP). With a total of 3 patents, he has made significant advancements in polishing compositions that enhance the efficiency of semiconductor manufacturing processes.
Latest Patents
Henry's latest patents include innovative formulations and methods for CMP. One of his key patents focuses on the chemical mechanical planarization of films comprising elemental silicon. This invention involves polishing compositions that utilize abrasive particles and additives to boost removal rates of films such as poly-silicon and Silicon-Germanium. Another significant patent details a CMP composition that includes chemical additives and methods for their application. This composition comprises abrasive materials, chemical additives, a liquid carrier, and optional components like an oxidizing agent and a pH buffering agent. These CMP compositions are designed to enhance the removal rates for various films, including SiC, SiN, and SiCN, while providing tunable removal selectivity.
Career Highlights
Throughout his career, James Matthew Henry has worked with prominent companies in the industry, including Air Products and Chemicals, Inc. and Versum Materials US, LLC. His work has significantly impacted the development of CMP technologies, making him a valuable asset in the semiconductor manufacturing sector.
Collaborations
Henry has collaborated with notable professionals in his field, including Xiaobo Shi and James Allen Schlueter. These collaborations have contributed to the advancement of CMP technologies and the successful implementation of his patented innovations.
Conclusion
James Matthew Henry's contributions to chemical mechanical planarization have established him as a key figure in the semiconductor industry. His innovative patents and collaborations continue to influence the development of efficient manufacturing processes.
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