Isao Gunji

Title: Isao Gunji: Innovator in Plasma Processing Technology

Introduction

Isao Gunji is a prominent inventor based in Nirasaki, Japan, known for his contributions to plasma processing technology. With a total of 8 patents to his name, Gunji has made significant advancements in the field, particularly in the design and functionality of plasma processing apparatuses.

Latest Patents

One of Gunji's latest inventions is a plasma processing apparatus that features a processing container, a ceiling wall with an opening, and a transmission window designed to close the opening. This innovative design includes a recess portion that serves as a supply port for electromagnetic waves, enhancing the efficiency of the processing container. Additionally, the apparatus is equipped with first gas supply holes on the lower surface of the ceiling wall and second gas supply holes on the inner surface of the recess portion. Another notable patent is a plasma processing method that involves supplying gas into a processing container and intermittently supplying microwave powers from multiple microwave introducing modules. This method allows for a periodic OFF state of all microwave powers, optimizing the processing conditions.

Career Highlights

Throughout his career, Isao Gunji has worked with notable companies such as Tokyo Electron Limited and Central Glass Company, Limited. His experience in these organizations has contributed to his expertise in plasma processing technologies and has facilitated the development of his innovative patents.

Collaborations

Gunji has collaborated with esteemed colleagues, including Hitoshi Itoh and Hidenori Miyoshi, who have played a role in advancing his research and development efforts.

Conclusion

Isao Gunji's work in plasma processing technology exemplifies his innovative spirit and dedication to advancing the field. His patents reflect a commitment to improving processing methods and apparatuses, making significant contributions to the industry.