Inna Steely-Tarshish

Title: Inna Steely-Tarshish: Innovator in Electron Beam Overlay Technology

Introduction

Inna Steely-Tarshish is a prominent inventor based in Yokneam Ilit, Israel. She has made significant contributions to the field of semiconductor metrology, particularly in electron beam overlay technology. With a total of six patents to her name, her work has advanced the precision and efficiency of overlay measurements in semiconductor manufacturing.

Latest Patents

Inna's latest patents include innovative designs for electron beam overlay targets and methods for performing overlay measurements. One of her notable patents describes a target that features a plurality of electron beam overlay elements and two-dimensional elements, which provide at least one two-dimensional imaging. This target includes an array of evenly-spaced polygonal gratings arranged across multiple rows and columns. Another patent focuses on a target that incorporates both electron beam overlay elements and AIMid elements, with each element consisting of gratings overlaid at perpendicular orientations. These advancements enable enhanced overlay measurements and imaging metrology.

Career Highlights

Throughout her career, Inna has worked with notable companies, including Kla Corporation. Her expertise in semiconductor technology has positioned her as a key player in the industry, contributing to the development of cutting-edge metrology tools.

Collaborations

Inna has collaborated with esteemed professionals in her field, including Stefan Eyring and Ulrich Pohlmann. These partnerships have fostered innovation and have been instrumental in her research and development efforts.

Conclusion

Inna Steely-Tarshish is a trailblazer in the realm of electron beam overlay technology, with a strong portfolio of patents that reflect her innovative spirit. Her contributions continue to shape the future of semiconductor manufacturing and metrology.