logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11809090 B1

PDFFull Text
Date of Patent:
Nov. 07, 2023

Filed:

Aug. 18, 2020

Composite overlay metrology target

Applicant:

Kla Corporation, Milpitas, CA (US);

Inventors:

Anna Golotsvan, Qiryat Tivon, IL;

Inna Steely-Tarshish, Haifa, IL;

Mark Ghinovker, Yoqneam Ilit, IL;

Rawi Dirawi, Milpitas, CA (US);

Assignee:

KLA Corporation, Milpitas, CA (US);

Attorney:

Suiter Swantz pc llo

Primary Examiner:

David E Smith

Assistant Examiner:

Hsien C Tsai

Int. Cl.
CPC ...
G01N 21/47 (2006.01); G03F 7/00 (2006.01); G01N 23/2251 (2018.01);
U.S. Cl.
CPC ...
G03F 7/70633 (2013.01); G01N 21/47 (2013.01); G01N 23/2251 (2013.01); G03F 7/70608 (2013.01); G03F 7/70683 (2013.01); G01N 2223/07 (2013.01);
Abstract

A metrology target includes a first set of pattern elements compatible with a first metrology mode along one or more directions, and a second set of pattern elements compatible with a second metrology mode along one or more directions, wherein the second set of pattern elements includes a first portion of the first set of pattern elements, and wherein the second set of pattern elements is surrounded by a second portion of the first set of pattern elements not included in the second set of pattern elements.

Find Patent Forward Citations

Golotsvan, Anna. (2023). Composite overlay metrology target (U.S. Patent No. 11809090). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11809090

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…