Stamford, CT, United States of America

Iliya Sigal

USPTO Granted Patents = 3 

Average Co-Inventor Count = 4.5

ph-index = 1


Company Filing History:


Years Active: 2022-2024

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3 patents (USPTO):

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Title: A Closer Look at Inventor Iliya Sigal

Introduction:

Inventor Iliya Sigal is a renowned figure in the world of innovation, hailing from Stamford, CT in the US. With an impressive portfolio of 3 patents under his belt, Sigal has made significant contributions to the field of lithographic apparatus and substrate table technology.

Latest Patents:

Sigal's latest patents include a groundbreaking lithographic apparatus, substrate table, and method. This innovation showcases a substrate table equipped with coarse burls that feature fine burls on their surface. The fine burls come into contact with the substrate, ensuring optimal support and precision during lithographic processes. Additionally, Sigal has developed lithography supports with defined burltop topography, revolutionizing semiconductor photolithography by reducing adhesion and friction between wafers and wafer tables.

Career Highlights:

Throughout his career, Iliya Sigal has been associated with prominent companies such as ASML Holding N.V. and ASML Netherlands B.V. His expertise and innovative spirit have propelled him to the forefront of technological advancements, particularly in the realm of lithography and semiconductor manufacturing.

Collaborations:

Sigal's collaborative efforts with esteemed professionals such as Matthew Lipson and Mehmet Ali Akbas have further solidified his reputation as a visionary inventor. Together, they have explored new frontiers in lithographic technology, paving the way for enhanced efficiency and precision in industrial processes.

Conclusion:

Inventor Iliya Sigal stands as a testament to the power of innovation and determination in the realm of patents and inventions. His groundbreaking work in lithography and substrate table design has left an indelible mark on the industry, inspiring future generations of inventors to push the boundaries of what is possible in the world of technology.

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