The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2026
Filed:
Dec. 02, 2021
Asml Holding N.v., Veldhoven, NL;
Asml Netherlands B.v., Veldhoven, NL;
Abdullah Alikhan, Stratford, CT (US);
Tammo Uitterdijk, Wilton, CT (US);
Johannes Bernardus Charles Engelen, 'S-Hertogenbosch, NL;
Daniel Kamieniecki, Stamford, CT (US);
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Rosmalen, NL;
Thomas Poiesz, Veldhoven, NL;
Leon Martin Levasier, Hedel, NL;
Jim Vincent Overkamp, Eindhoven, NL;
Johannes Adrianus Cornelis Maria Pijnenburg, Moergestel, NL;
Koos Van Berkel, Waalre, NL;
Gregory James Diguido, Norwalk, CT (US);
Anthony C. Socci, Jr., Greenwich, CT (US);
Iliya Sigal, Stamford, CT (US);
Bram Antonius Gerardus Lomans, Eindhoven, NL;
Michel Ben Isel Habets, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Systems, apparatuses, and methods are provided for manufacturing a substrate table. An example method can include forming a vacuum sheet including a plurality of vacuum connections and a plurality of recesses configured to receive a plurality of burls disposed on a core body for supporting an object such as a wafer. Optionally, at least one burl can be surrounded, partially or wholly, by a trench. The example method can further include using the vacuum sheet to mount the core body to an electrostatic sheet including a plurality of apertures configured to receive the plurality of burls. Optionally, the example method can include using the vacuum sheet to mount the core body to the electrostatic sheet such that the plurality of recesses of the vacuum sheet line up with the plurality of burls of the core body and the plurality of apertures of the electrostatic sheet.