Location History:
- Portland, OR (US) (2019)
- Austin, TX (US) (2007 - 2022)
Company Filing History:
Years Active: 2007-2022
Title: Ian J. Brown: Innovator in Advanced Photolithography Techniques
Introduction
Ian J. Brown, located in Austin, TX, is a notable inventor with a prolific record of 21 patents. He has made significant contributions to the field of photolithography, particularly in enhancing processes that support semiconductor manufacturing.
Latest Patents
Among his latest innovations is the patent for "UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly." This processing method presents an advanced technique for directed self-assembly (DSA), facilitating the creation of improved guide strips in DSA templates capable of forming sub-30 nm features on substrates. The method enhances the selectivity of wet chemical processing by utilizing ultraviolet light at specific wavelengths to optimize the organic layers involved.
Another noteworthy patent is the "System and method for enhanced removal of metal hardmask using ultraviolet treatment." This innovative system combines hydrogen peroxide and ultraviolet (UV) irradiation, resulting in a remarkable improvement in cleaning efficiency. The method provides about a 100% enhancement in the TiN strip rate compared to treatments without UV exposure, all while maintaining functionality at room temperature.
Career Highlights
Ian is currently affiliated with Tokyo Electron Limited, where he utilizes his expertise to further the development of cutting-edge technologies in the semiconductor industry. His deep understanding of photolithography and innovative methodologies continues to shape the advancements in substrate processing.
Collaborations
Throughout his career, Ian has collaborated with esteemed coworkers such as Wallace Paul Printz and Mark H. Somervell. Together, they have contributed to various projects, furthering their collective impact on technologies that drive the semiconductor manufacturing sector.
Conclusion
Ian J. Brown stands out as a key figure in the field of photolithography. His 21 patents highlight his dedication to innovation and his commitment to enhancing manufacturing processes through advanced technologies. His work not only illustrates his inventive spirit but also contributes to the efficiencies within the semiconductor industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.