Hung-Jui Chang

Title: Innovations by Inventor Hung-Jui Chang from Changhua, Taiwan

Introduction: Hung-Jui Chang is a notable inventor based in Changhua, Taiwan, recognized for his contributions to the field of semiconductor fabrication. With a total of four patents to his name, his work focuses primarily on advanced etching processes that enhance the efficiency and effectiveness of manufacturing semiconductors.

Latest Patents: Among his latest innovations is the patent titled "Etch process with rotatable shower head." This invention details an exemplary etching process in a reactor, showcasing a shower head equipped with an electrostatic chuck to receive radio frequency (RF) power. The method involves several key steps, including rotating the shower head's plates and performing surface modification and etching cycles through controlled voltage and RF power application.

Another significant patent is the "Method for controlling exposure region in bevel etching process for semiconductor fabrication." This invention introduces a plasma processing apparatus consisting of both lower and upper sheltering modules, along with a plasma generation module. The design aims to generate plasma effectively within the defined regions to improve etching precision in the semiconductor manufacturing process.

Career Highlights: Hung-Jui Chang's professional journey is closely associated with Taiwan Semiconductor Manufacturing Company Limited (TSMC), a leading entity in the semiconductor industry. His role at TSMC places him at the forefront of innovative semiconductor technologies, significantly contributing to the advancement of the industry.

Collaborations: Chang has had the opportunity to collaborate with esteemed colleagues such as Yi-Wei Chiu and Sheng-Wen Chen. Together, they have worked on various projects that harness their collective expertise in the field of semiconductor fabrication and enhancements in etching processes.

Conclusion: With four patents to his credit and a crucial role at Taiwan Semiconductor Manufacturing Company Limited, Hung-Jui Chang continues to impact the semiconductor industry profoundly. His innovative approaches to etching processes demonstrate the importance of continuous development in semiconductor technologies, ensuring advancements that benefit the entire field.