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For the Inventor, By the Inventor

Shetou Shiang, Taiwan

Hung Jui Chang

USPTO Granted Patents = 24 

Average Co-Inventor Count = 4.2

ph-index = 3

Forward Citations = 30(Granted Patents)


Location History:

  • Shetou Township, Changhua County, TW (2011)
  • Changhua, TW (2020)
  • Changhua County, TW (2013 - 2023)
  • Shetou Shiang, TW (2018 - 2023)

Company Filing History:

goldMedal24 out of 40,780 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents

Years Active: 2011-2025

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24 patents (USPTO):Explore Patents
1. 12300593 - Semiconductor device and method of manufacture (2025-05-13),
2. 12266567 - Method of forming a barrier layer in an interconnect structure of semiconductor device (2025-04-01),
3. 11854873 - Etch profile control of interconnect structures (2023-12-26),
4. 11810846 - Semiconductor device and method of manufacture (2023-11-07),
5. 11569125 - Etch profile control of interconnect structures (2023-01-31),
6. 11335593 - Interconnect structure of semiconductor device including barrier layer located entirely in via (2022-05-17),
7. 11195750 - Etch profile control of interconnect structures (2021-12-07),
8. 11075087 - Focus ring for plasma etcher (2021-07-27),
9. 11031279 - Semiconductor device with reduced trench loading effect (2021-06-08),
10. 11004730 - Methods of forming conductive features using a vacuum environment (2021-05-11),
11. 10998259 - Semiconductor device and method of manufacture (2021-05-04),
12. 10847349 - Moving focus ring for plasma etcher (2020-11-24),
13. 10707123 - Etch profile control of interconnect structures (2020-07-07),
14. 10679891 - Methods of forming interconnect structures using a vacuum environment (2020-06-09),
15. 10566232 - Post-etch treatment of an electrically conductive feature (2020-02-18),

Title: Innovations by Hung Jui Chang in Semiconductor Technology

Introduction

Hung Jui Chang, located in Shetou Shiang, Taiwan, is a prominent inventor known for his significant contributions to semiconductor technology. Holding an impressive portfolio of 22 patents, he is recognized for his innovative approaches that enhance the manufacturing processes and performance of semiconductor devices.

Latest Patents

Hung Jui Chang's latest patents include advancements in etch profile control of interconnect structures and methods for semiconductor device manufacturing. The first patent outlines a method for forming a semiconductor structure that includes an etch stop layer on a substrate, a metal oxide layer, and an interlayer dielectric (ILD) layer. This method incorporates the formation of trench etch openings and capping layers, optimizing the structure's integrity. His second patent presents a process featuring a dielectric layer over a substrate, an anti-reflective layer, and the use of a hardmask for creating via and trench openings. This innovative approach leads to the formation of interconnects with specific profile angles and depth ratios, crucial for enhancing device performance.

Career Highlights

As a key member of Taiwan Semiconductor Manufacturing Company Ltd., Hung Jui Chang has played an essential role in developing cutting-edge technologies in semiconductor fabrication. His work has been pivotal in pushing the boundaries of what is achievable in the industry, making him a respected figure among his peers.

Collaborations

In his career, Hung has collaborated with talented coworkers such as Yi-Wei Chiu and Yu-Wei Kuo. Together, they have contributed to various projects and advancements in semiconductor technology, furthering the company's mission to lead in innovation and development.

Conclusion

Hung Jui Chang's remarkable contributions to the field of semiconductor technology, exemplified by his 22 patents, underline his position as a leading inventor in the industry. His latest works on etching processes and interconnect features demonstrate a commitment to innovation and excellence, ensuring continued advancements in semiconductor devices.

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