Hung-Hao Chen

Title: **Inventor Profile: Hung-Hao Chen**

Introduction

Hung-Hao Chen, an accomplished inventor based in Hsinchu, Taiwan, has made significant contributions to the field of semiconductor technology. With a portfolio of 13 patents, Chen's work focuses on advancing manufacturing processes and device structures that improve performance and efficiency in the semiconductor industry.

Latest Patents

Among his latest innovations are two noteworthy patents:

1. **Semiconductor Device and Method of Manufacture**

This patent presents a semiconductor device where a passivation layer is patterned. It highlights an innovative approach to removing by-products from the patterning process in the same etching chamber simultaneously with the removal of photoresist. This method is particularly valuable during the manufacturing of FinFET devices.

2. **Method for Forming Semiconductor Device Structure with Fine Line Pitch and Fine End-to-End Space**

This method involves forming a semiconductor structure by creating a substrate with multiple layers, including a bottom layer, middle layer, and top layer. The top layer is patterned to create a patterned top, while the middle layer is patterned using a plasma process with a mixed gas, including hydrogen. By controlling the flow rate of hydrogen, this process enhances the etching selectivity of the middle layer.

Career Highlights

Hung-Hao Chen is currently affiliated with Taiwan Semiconductor Manufacturing Company Limited (TSMC), a leader in the semiconductor industry. Throughout his career, he has consistently demonstrated a commitment to innovation, driving advancements that have significant implications for the technology sector. His dedication to research and development continues to position him as a vital contributor within the field.

Collaborations

Chen has collaborated with notable colleagues, including Yu-Cheng Liu and Che-Cheng Chang. These partnerships have been instrumental in fostering a collaborative environment that enhances the development and refinement of semiconductor technologies.

Conclusion

With 13 patents to his name, Hung-Hao Chen exemplifies the spirit of innovation within the semiconductor arena. His latest patents reflect a deep understanding of manufacturing processes and a commitment to advancing technology. His ongoing contributions through collaborations and his role at Taiwan Semiconductor Manufacturing Company Limited establish him as a key figure in pushing the boundaries of what is possible in semiconductor device manufacturing.