San Ramon, CA, United States of America

Hun Sang Kim

USPTO Granted Patents = 8 

Average Co-Inventor Count = 3.6

ph-index = 4

Forward Citations = 166(Granted Patents)


Company Filing History:


Years Active: 2012-2021

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8 patents (USPTO):

Title: The Innovations of Hun Sang Kim

Introduction

Hun Sang Kim is a prominent inventor based in San Ramon, CA (US). He has made significant contributions to the field of substrate processing, holding a total of 8 patents. His work focuses on enhancing the efficiency and effectiveness of processing chambers used in various fabrication processes.

Latest Patents

Among his latest patents, Hun Sang Kim has developed a processing chamber with substrate edge enhancement processing. This invention provides an apparatus and methods for processing a substrate, particularly enhancing processing efficiency at the edge of the substrate. The processing chamber comprises a chamber body defining an interior processing region, a showerhead assembly with multiple zones, and a focus ring that enhances the processing capabilities at the substrate's edge.

Another notable patent involves gas flow for condensation reduction with a substrate processing chuck. This invention describes a workpiece holder that includes a puck for carrying the workpiece, a thermally coupled top plate, and a cooling plate with a cooling channel. The design aims to supply a dry gas under pressure to eliminate ambient air, thereby improving the processing environment.

Career Highlights

Hun Sang Kim is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His innovative work has contributed to advancements in substrate processing technologies, making him a valuable asset to his organization.

Collaborations

Throughout his career, Hun Sang Kim has collaborated with notable colleagues, including Michael D. Willwerth and Jinhan Choi. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Hun Sang Kim's contributions to substrate processing through his innovative patents and collaborations highlight his importance in the field. His work continues to influence advancements in technology and fabrication processes.

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