Hsinchu, Taiwan

Hsuan-Pang Liu


Average Co-Inventor Count = 5.0

ph-index = 2

Forward Citations = 5(Granted Patents)


Company Filing History:


Years Active: 2019-2024

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6 patents (USPTO):

Title: Hsuan-Pang Liu: Innovator in Ion Implantation and Polishing Technologies

Introduction

Hsuan-Pang Liu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patents. Liu holds a total of 6 patents, showcasing his expertise and dedication to advancing technology.

Latest Patents

One of Liu's latest patents is an ion implantation method and device. This system includes a sample platform, an ion gun, an electrostatic linear accelerator, a direct current (DC) final energy magnet (FEM), and a processor. The processor is programmed to control various components, including a wafer acceptance test instrument, a DC recipe calculator, a DC real energy calculator, and a tool energy shift verifier. The system is designed to tune the DC FEM based on verified tool energy shifts, ultimately obtaining a peak magnetic field of the DC FEM.

Another notable patent involves a polishing pad and the method for manufacturing it. This polishing pad is intended for use in a chemical-mechanical polishing apparatus and consists of a first support layer and a polishing layer. The polishing layer features a top surface that faces away from the first support layer and includes at least one first cavity buried beneath the top surface.

Career Highlights

Hsuan-Pang Liu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has significantly impacted the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Liu has collaborated with several talented individuals in his field, including Yi-Hsiung Lin and Cheng-En Lee. Their combined expertise has contributed to the successful development of innovative technologies.

Conclusion

Hsuan-Pang Liu's contributions to ion implantation and polishing technologies highlight his role as a key innovator in the semiconductor industry. His patents reflect a commitment to advancing manufacturing processes and improving technology.

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