Company Filing History:
Years Active: 2012-2021
Title: Holger Maltor: Innovator in EUV Lithography Technology
Introduction
Holger Maltor is a distinguished inventor based in Aalen, Germany. He has made significant contributions to the field of lithography, particularly in the development of substrates for EUV (Extreme Ultraviolet) mirrors. With a total of 4 patents to his name, Maltor's work is pivotal in advancing technologies used in semiconductor manufacturing.
Latest Patents
Maltor's latest patents include innovative designs for substrates suitable for mirrors used at wavelengths in the EUV range. One of his notable patents describes a substrate that includes a base body made of a precipitation-hardened alloy, intermetallic phases, or particulate composites. This substrate is designed to enhance the performance of EUV mirrors by incorporating a highly reflective layer on a polishing layer. Another patent focuses on substrates for mirrors specifically for EUV lithography, emphasizing a main body produced from an aluminum alloy and a polishing layer with exceptional smoothness and minimal roughness.
Career Highlights
Holger Maltor is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and lithography technology. His work at this esteemed organization has allowed him to push the boundaries of innovation in the field. Maltor's expertise in materials science and engineering has been instrumental in developing advanced solutions for the semiconductor industry.
Collaborations
Maltor has collaborated with notable colleagues such as Martin Weiser and Claudia Ekstein. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.
Conclusion
Holger Maltor's contributions to EUV lithography technology exemplify the impact of innovative thinking in the field of semiconductor manufacturing. His patents and work at Carl Zeiss SMT GmbH continue to shape the future of lithography, making him a key figure in this vital industry.
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