Location History:
- Nirasaki, JP (2018 - 2023)
- Yamanashi, JP (2013 - 2024)
Company Filing History:
Years Active: 2013-2024
Title: Innovative Contributions of Hiroyuki Toshima in Substrate Processing Technologies
Introduction
Hiroyuki Toshima, an accomplished inventor based in Yamanashi, Japan, holds an impressive portfolio of 19 patents. His innovations primarily focus on substrate processing methods and apparatus, significantly advancing technologies used in semiconductor manufacturing.
Latest Patents
Among Toshima's latest contributions are two notable patents: the "Substrate Processing Method and Apparatus" and the "Sputtering Apparatus." The substrate processing method involves a sophisticated processing mechanism incorporating multiple targets and magnet-moving mechanisms designed to operate in synchronization. By enabling the magnets to reciprocate at different phases, this method optimizes substrate processing efficiency.
The sputtering apparatus patent presents a dual-target system that enhances the accuracy and effectiveness of sputter particle emission. It features innovative shielding and obstructing mechanisms that prevent cross-contamination between particles emitted from different targets, ensuring greater precision during substrate support.
Career Highlights
Hiroyuki Toshima is associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment field. His work at the company has placed him at the forefront of innovation, shaping critical processes that impact electronic fabrication.
Collaborations
Throughout his career, Toshima has collaborated with esteemed colleagues, including Tatsuo Hatano and Masato Shinada. Their joint efforts in research and development have driven the success of several advanced technologies in substrate processing.
Conclusion
Hiroyuki Toshima's contributions to substrate processing technology mark significant advancements in the semiconductor industry. With a diverse array of patents and a commitment to innovation, Toshima continues to influence the field and inspire future developments. His work exemplifies the critical role of inventors in enhancing technology and driving progress.