Location History:
- Tokyo, JA (1976 - 1977)
- Ebina, JP (1978)
- Kamakura, JP (1998)
- Yokohama, JP (1993 - 2001)
- Moka, JP (2004)
- Utsunomiya, JP (1998 - 2016)
- Tochigi, JP (2004 - 2017)
- Oyama, JP (2016 - 2023)
Company Filing History:
31 out of 90,594 
6 out of 560 
2 out of 1,007 
Years Active: 1976-2023
Title: Hiroshi Tanaka: A Pioneer in Laser Technology and Light Source Innovation
Introduction
Hiroshi Tanaka, a notable inventor hailing from Tochigi, Japan, holds an impressive portfolio of 41 patents in the field of laser technology and light source systems. His inventions have significantly contributed to advancements in various high-tech industries, particularly in photolithography, which is essential for semiconductor manufacturing.
Latest Patents
Among his latest patents, Tanaka has developed a "Laser apparatus and extreme ultraviolet light generation system." This innovative laser apparatus consists of a mirror designed to reflect a laser beam, an actuator that operates the mirror, and a controller that predicts the completion time of the actuator's movement. The controller also transmits a polling signal to ensure efficient operation after the predicted interval.
Another significant patent is for a "Light source apparatus and data processing method," which serves an exposure apparatus that repeatedly exposes multiple wafers. The exposure process involves scanning individual areas defined within each wafer's total exposure region. The apparatus includes a light source controller, a detector to analyze the characteristics of the pulsed light, and a data collection processor to compile essential data for each exposure.
Career Highlights
Tanaka has been associated with prestigious companies such as Canon and Gigaphoton. At Canon, he contributed to several groundbreaking projects that propelled advancements in imaging technology. His later tenure at Gigaphoton allowed him to focus on ultra-high precision light sources that play a crucial role in the semiconductor industry.
Collaborations
Throughout his career, Tanaka has collaborated with distinguished colleagues including Osamu Wakabayashi and Shigeyuki Uzawa. Their combined expertise has fostered innovations and led to successful projects in laser technology and data processing methods.
Conclusion
Hiroshi Tanaka's work exemplifies the spirit of innovation in laser technology and light sources. His contributions have not only advanced the understanding of these complex systems but have also paved the way for future developments in the semiconductor manufacturing industry. With a robust collection of patents, Tanaka continues to be a pivotal figure in the advancement of cutting-edge technologies.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.