The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
Mar. 24, 2004
Hiroshi Tanaka, Tochigi, JP;
Hiroshi Tanaka, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An apparatus for detecting a position of a target mark out of a plurality of marks in a region of an object to obtain a position of the region of the object. The apparatus includes a scope configured to sense a first image of the object at a first magnification and a second image of the object at a second magnification higher than the first magnification, and a processor configured to extract, from the first image, a position of a first mark out of the plurality of marks and a feature of a region outside the first mark, to identify the first mark based on the extracted feature, to extract, from the second image, a position of the target mark, to evaluate reliability of the extracted position of the target mark, to select a second mark, different from the target mark, from the plurality of marks as a new target mark based on the evaluated reliability and the identified first mark in order to extract a position of the selected second mark from an image sensed by the scope at the second magnification.