Hiroshi Shimomoto

Title: Innovations by Hiroshi Shimomoto

Introduction

Hiroshi Shimomoto is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing, holding a total of 10 patents. His work focuses on improving the efficiency and effectiveness of substrate cleaning and processing technologies.

Latest Patents

Among his latest patents is a substrate processing apparatus that includes a polishing section and a transport section. This apparatus features a first polishing unit, a second polishing unit, and a transport mechanism. The first polishing unit consists of a first polishing apparatus and a second polishing apparatus, while the second polishing unit includes a third polishing apparatus and a fourth polishing apparatus. Each of these polishing apparatuses is equipped with a polishing table that has a polishing pad mounted on it, along with a top ring and auxiliary units that perform processes on the polishing pad during polishing. The design allows for a pair of auxiliary unit mounting units to be positioned symmetrically around the polishing table, enhancing the apparatus's functionality.

Another significant patent is a method of cleaning a substrate. This method involves holding and rotating a substrate using a substrate holder. It also includes supplying a chemical liquid to a chemical liquid nozzle and two fluids to a two-fluid nozzle while moving both nozzles radially outward from the center to the periphery of the substrate. Notably, the distance of the chemical-liquid nozzle from the rotating axis of the substrate holder is longer than that of the two-fluid nozzle, optimizing the cleaning process.

Career Highlights

Hiroshi Shimomoto has worked with prominent companies, including Ebara Corporation. His experience in the industry has allowed him to develop innovative solutions that address complex challenges in substrate processing.

Collaborations

Throughout his career, Shimomoto has collaborated with talented individuals such as Koji Maeda and Soichi Isobe. These partnerships have contributed to the advancement of his inventions and the successful implementation of his patented technologies.

Conclusion

Hiroshi Shimomoto's contributions to substrate processing through his innovative patents demonstrate his expertise and commitment to advancing technology in this field. His work continues to influence the industry and inspire future innovations.