Hiroshi Komori

Title: Hiroshi Komori: Innovator in Extreme Ultraviolet Light Source Technology

Introduction

Hiroshi Komori is a prominent inventor based in Hiratsuka, Japan. He has made significant contributions to the field of extreme ultraviolet (EUV) light source technology, holding a total of 16 patents. His work has been instrumental in advancing the capabilities of EUV light sources, which are crucial for various applications, including semiconductor manufacturing.

Latest Patents

Among his latest patents is the "Extreme ultraviolet light source device and method for generating extreme ultraviolet light." This innovative device ionizes a target material in an ionizer and supplies the ionized target material to a point of generating plasma, effectively reducing debris generation. The ionizer simultaneously irradiates laser beams of multiple wavelengths corresponding to the excited level of tin on the target material to ionize it. The ionized target material is then extracted from the ionizer with a high voltage applied from an ion beam extractor, accelerated, and supplied to a plasma generation chamber. When a driver laser beam is irradiated on the ionized target material, plasma is generated, emitting EUV radiation.

Another notable patent is the "Extreme ultra violet light source device," which is of a laser-produced plasma type. In this device, charged particles such as ions emitted from plasma can be efficiently ejected. It includes a target nozzle that supplies a target material, a laser oscillator that applies a laser beam to the target material to generate plasma, collector optics that collect extreme ultraviolet light radiated from the plasma, and a magnetic field forming unit that creates an asymmetric magnetic field where the laser beam is applied to the target material.

Career Highlights

Hiroshi Komori has worked with notable companies such as Gigaphoton Inc. and Komatsu Corporation. His experience in these organizations has allowed him to refine his expertise in the development of advanced light source technologies.

Collaborations

Throughout his career, Komori has collaborated with esteemed colleagues, including Yoshifumi Ueno and Akira Endo. These partnerships have contributed to the innovative advancements in the field of EUV technology.

Conclusion

Hiroshi Komori's contributions to extreme ultraviolet light source technology have established him as a leading inventor in this specialized field. His patents reflect a commitment to innovation and excellence, paving the way for future advancements in technology.