The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Apr. 13, 2009
Georg Soumagne, Hiratsuka, JP;
Yoshifumi Ueno, Hiratsuka, JP;
Hiroshi Komori, Hiratsuka, JP;
Akira Sumitani, Hiratsuka, JP;
Katsunobu Nishihara, Suita, JP;
Young Gwang Kang, Suita, JP;
Masanori Nunami, Suita, JP;
Georg Soumagne, Hiratsuka, JP;
Yoshifumi Ueno, Hiratsuka, JP;
Hiroshi Komori, Hiratsuka, JP;
Akira Sumitani, Hiratsuka, JP;
Katsunobu Nishihara, Suita, JP;
Young Gwang Kang, Suita, JP;
Masanori Nunami, Suita, JP;
Gigahoton Inc., Tokyo, JP;
Osaka University, Osaka, JP;
Abstract
In an extreme ultra violet light source apparatus of a laser produced plasma type, charged particles such as ions emitted from plasma are promptly ejected to the outside of a chamber. The extreme ultra violet light source apparatus includes a chamber in which extreme ultra violet light is generated, a target supply unit for supplying a target material to a predetermined position within the chamber, a driver laser for applying a laser beam to the target material supplied by the target supply unit to generate plasma, a collector mirror for collecting the extreme ultra violet light radiated from the plasma to output the extreme ultra violet light, a magnetic field forming unit for forming an asymmetric magnetic field in a generation position of the plasma by using a coil, and a charged particle collection mechanism provided on at least one of two surfaces of the chamber to which lines of magnetic force generated by the coil extend.