Masanori Nunami

Title: The Innovative Mind of Masanori Nunami

Introduction

Masanori Nunami, an esteemed inventor based in Suita, Japan, has made significant contributions to the field of extreme ultraviolet (EUV) light source apparatuses. With a total of two patents to his name, Nunami is paving the way for advancements in technology that utilize extreme ultraviolet light.

Latest Patents

Masanori Nunami's latest inventions revolve around the development of an extreme ultraviolet light source apparatus of a laser-produced plasma type. His first patent describes a system where charged particles, such as ions emitted from plasma, are promptly ejected outside of a chamber. This apparatus comprises a chamber, a target supply unit that delivers the target material into the chamber, a collector mirror for gathering extreme ultraviolet light radiated from the plasma, and an electromagnet positioned outside the chamber. A charged particle collection mechanism is also integrated on the surfaces of the chamber, where magnetic force lines generated by the electromagnet extend.

In his second patent, Nunami further innovates upon the extreme ultraviolet light source apparatus. This design includes a chamber for generating extreme ultraviolet light, a target supply unit, and a driver laser for generating plasma from the target material. Additionally, it features a collector mirror to output the extreme ultraviolet light and a magnetic field forming unit that creates an asymmetric magnetic field at the plasma generation position using a coil. As with the first patent, a charged particle collection mechanism is included on the chamber's surfaces where magnetic force lines from the coil extend.

Career Highlights

Masanori Nunami has had a distinguished career working with notable institutions such as Osaka University and Gigahoton Inc. His expertise in plasma technology and light source engineering has enabled him to innovate and refine methodologies that are crucial for various applications in industries relying on extreme ultraviolet light.

Collaborations

Throughout his career, Nunami has collaborated with esteemed peers, including Georg Soumagne and Yoshifumi Ueno. These collaborations have facilitated the exchange of ideas and have significantly contributed to the advancements in the technology surrounding extreme ultraviolet light sources.

Conclusion

Masanori Nunami stands out as a prominent inventor in the field of extreme ultraviolet light technology. With his dual patents and noteworthy collaborations, he continues to drive forward innovations that will undoubtedly impact a wide range of industries reliant on advanced light sourcing techniques. His ongoing work represents the fusion of scientific inquiry and practical application, embodying the spirit of innovation within the realm of modern technology.