The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2012
Filed:
Apr. 24, 2008
Yoshifumi Ueno, Tokyo, JP;
Masato Moriya, Tokyo, JP;
Masaki Nakano, Tokyo, JP;
Hiroshi Komori, Tokyo, JP;
Yoshifumi Ueno, Tokyo, JP;
Masato Moriya, Tokyo, JP;
Masaki Nakano, Tokyo, JP;
Hiroshi Komori, Tokyo, JP;
Komatsu Ltd., Tokyo, JP;
Abstract
Solid tin (Sn) is used as a target, a COlaser is used as an excitation source for the target, and after the size of debris emitted from plasma is decreased to a nanometer or smaller size by exciting the solid tin by a laser beam outputted from the COlaser, the emitted debris of a nanometer or smaller size is acted upon so as not to reach the optical element. In accordance with the present invention, in the EUV light source apparatus, the debris emitted together with EUV light from plasma generated by exciting a target within a chamber by a laser beam is prevented from adhering to an optical element provided within the chamber and forming a metal film. As a result, the service life of the optical element can be extended.