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Nirasaki, Japan

Hiromi Shima

This inventor holds 7 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2016-2021.

USPTO Granted Patents = 7

% Patents Active = 100.0

Average Co-Inventor Count = 3.8

ph-index = 1

Forward Citations = 463(Granted Patents)

Company Filing History:

7 out of 10,862

Tokyo Electron Limited

Years Active: 2016-2021

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10968515 - Vertical heat treatment apparatus (2021-04-06),

2. 10964530 - Method of forming blocking silicon oxide film, and storage medium (2021-03-30),

3. 10781515 - Film-forming method and film-forming apparatus (2020-09-22),

4. 10553686 - Method and apparatus for forming silicon oxide film, and storage medium (2020-02-04),

5. 9758867 - Method of controlling gas supply apparatus and substrate processing system (2017-09-12),

6. 9640448 - Film forming method, film forming apparatus, and storage medium (2017-05-02),

7. 9422624 - Heat treatment method (2016-08-23),

Profile summary based on public USPTO records.

Please report any incorrect information to [email protected]

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