This inventor holds 7 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2016-2021.
Company Filing History:
Years Active: 2016-2021
Title: Hiromi Shima: Innovator in Heat Treatment Technology
Introduction
Hiromi Shima is a notable inventor based in Nirasaki, Japan. She has made significant contributions to the field of heat treatment technology, holding a total of 7 patents. Her innovative work focuses on methods and apparatuses that enhance the efficiency and effectiveness of film formation processes.
Latest Patents
One of her latest patents is a vertical heat treatment apparatus designed for forming a film by supplying a precursor gas to multiple substrates. These substrates are held in a substantially horizontal posture on a substrate holder, which maintains a predetermined interval in a vertical direction. The apparatus features a processing container that includes an inner tube accommodating the substrate holder and an outer tube positioned outside the inner tube. Additionally, a gas nozzle extends vertically along the inner peripheral surface of the inner tube, with a distal end that penetrates from the inside to the outside of the inner tube. This gas nozzle is equipped with a first gas hole for supplying precursor gas to the inner tube and a second gas hole for the outer tube.
Another significant patent involves a method of forming a blocking silicon oxide film on a target surface that has both silicon oxide and silicon nitride films exposed. This method includes placing a workpiece in a processing container under a depressurized atmosphere, forming a spacer polysilicon film on the target surface, and substituting this film with a silicon oxide film by applying thermal energy, oxygen radicals, and hydrogen radicals.
Career Highlights
Hiromi Shima is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. Her work at this organization has allowed her to develop and refine her innovative technologies, contributing to advancements in the field.
Collaborations
Throughout her career, Hiromi has collaborated with talented individuals such as Eiji Kikama and Kyungseok Ko. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Hiromi Shima's contributions to heat treatment technology and her innovative patents highlight her role as a significant inventor in her field. Her work continues to influence advancements in semiconductor manufacturing processes.