Location History:
- Mitaka, JP (2010 - 2015)
- Kawasaki, JP (2013 - 2020)
- Yamanashi, JP (2020)
- Tokyo, JP (2010 - 2023)
Company Filing History:
10 out of 356 
5 out of 10,326 
2 out of 1,714 
Years Active: 2010-2025
Title: Innovator Hiroki Maehara: Pioneering Advances in Conductive Superlattice Structures
Introduction
Hiroki Maehara, an influential inventor based in Kawasaki, Japan, has made significant contributions to the field of material science and engineering. With a remarkable portfolio of 15 patents, Maehara is recognized for his innovative approaches in developing conductive superlattice structures and advanced etching methods. His work exemplifies the intersection of creativity and technical expertise, which is vital in driving innovations forward.
Latest Patents
One of Maehara's latest patents focuses on "Conductive Superlattice Structures and Methods of Forming the Same." This method involves depositing a metal layer on a substrate followed by a ruthenium metal layer with a face-centered-cubic (fcc) crystal structure. This innovative approach ensures that the ruthenium maintains its fcc structure, enhancing the performance of the conductive superlattice.
Another notable patent is an "Etching Method" that utilizes sputtering techniques with ions in plasma for wafer etching. This method involves accommodating a wafer within a plasma processing apparatus to etch a multilayer film while adhering to specific geometric conditions, showcasing Maehara's commitment to precision and efficiency in semiconductor processing.
Career Highlights
Throughout his career, Hiroki Maehara has been associated with prominent companies, including Canon Anelva Corporation and Tokyo Electron Limited. His work in these organizations has solidified his reputation as a leader in technology innovation and material science.
Collaborations
Maehara has collaborated with notable professionals in his field, including Koji Tsunekawa and David Djulianto Djayaprawira. These partnerships have catalyzed the development of cutting-edge technologies and have been instrumental in advancing research efforts in conductive materials and processing techniques.
Conclusion
Hiroki Maehara stands as a testament to the power of innovation in the realm of conductive materials. His contributions to the development of superlattice structures and advanced etching methods enhance the capabilities of modern technology. As he continues to pioneer in his field, Maehara's work will undoubtedly influence future advancements in material science and semiconductor engineering.