The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Feb. 26, 2007
Yoshinori Nagamine, Kawasaki, JP;
Koji Tsunekawa, Kawasaki, JP;
David Djulianto Djayaprawira, Kawasaki, JP;
Hiroki Maehara, Kawasaki, JP;
Yoshinori Nagamine, Kawasaki, JP;
Koji Tsunekawa, Kawasaki, JP;
David Djulianto Djayaprawira, Kawasaki, JP;
Hiroki Maehara, Kawasaki, JP;
Canon Anelva Corporation, Kawasaki-shi, Kanagawa, JP;
Abstract
A magnetoresistance device has an MgO (magnesium oxide) layer provided between a first ferromagnetic layer and a second ferromagnetic layer. The device is manufactured by forming a film of the MgO layer in a film forming chamber. A substance whose getter effect with respect to an oxidizing gas is large is adhered to surfaces of components provided in the chamber for forming the MgO layer. The substance having a large getter effect is a substance whose value of oxygen gas adsorption energy is 145 kcal/mol or higher. Ta (tantalum), in particular, is preferable as a substance which constitutes the magnetoresistance device.