This inventor holds 6 USPTO granted patents. Top assignees: Nec Corporation, Nec Compound Semiconductor Devices, Ltd.. Active years: 1995-2003.
Company Filing History:
Years Active: 1995-2003
Title: Hirokazu Oikawa: Innovator in Semiconductor Technology
Introduction
Hirokazu Oikawa is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on enhancing the performance and efficiency of semiconductor devices.
Latest Patents
One of his latest patents is a compound semiconductor device with a delta-doped layer under an etching stopper layer for decreasing resistance between the active layer and the ohmic electrode. This innovation involves a high electron mobility transistor that features a channel layer overlain by an electron supply layer in contact with a gate electrode. The source and drain electrodes form ohmic contact with cap layers, and resistive etching stoppers are inserted to prevent over-etching of the electron supply layer. Extremely thin delta-doped layers are formed between the etching stopper layers and the electron supply layer, significantly reducing resistance. Another notable patent is a method of manufacturing a semiconductor device, which includes forming lower metal wiring on a base insulating film, followed by the application of a BCB film and a SiO film. The process utilizes lithography techniques to create contact holes, which are then filled with a conductor to form upper metal wiring.
Career Highlights
Hirokazu Oikawa has worked with notable companies such as NEC Corporation and NEC Compound Semiconductor Devices, Ltd. His experience in these organizations has allowed him to develop and refine his innovative ideas in semiconductor technology.
Collaborations
Throughout his career, Oikawa has collaborated with esteemed colleagues, including Hiroaki Tsutsui and Shuji Asai. These partnerships have contributed to the advancement of his research and the successful development of his patents.
Conclusion
Hirokazu Oikawa is a distinguished inventor whose work in semiconductor technology has led to several important patents. His innovations continue to impact the field, showcasing his expertise and dedication to advancing technology.