Nirasaki, Japan

Hirofumi Yamaguchi



Average Co-Inventor Count = 2.9

ph-index = 3

Forward Citations = 125(Granted Patents)


Location History:

  • Sudama-Cho, JP (1997)
  • Yamanashi, JP (2013)
  • Nirasaki, JP (2012 - 2023)

Company Filing History:


Years Active: 1997-2025

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8 patents (USPTO):Explore Patents

Title: Innovator Spotlight: Hirofumi Yamaguchi

Introduction: Hirofumi Yamaguchi, a prominent inventor based in Nirasaki, Japan, holds an impressive portfolio of seven patents. His contributions to the field of substrate processing technology are noteworthy, providing significant advancements and efficiencies in industrial processes.

Latest Patents: Among his latest innovations, Yamaguchi developed a "Substrate Processing Apparatus and Substrate Processing Method." This intricate apparatus includes a chamber equipped with a container that features both substrate-heating and substrate-cooling regions. It employs a heating mechanism to raise the temperature of one substrate while simultaneously cooling another, utilizing a partition to maintain separation in heat and pressure.

Furthermore, he has introduced a "Processing Instructing Device, Processing Instructing Method, Computer Program and Processing Device." This system enhances the efficiency of processing operations on various objects through advanced communication between processing devices and a conveyance controlling device. The system can predict arrival and finish times, facilitating optimized processing control.

Career Highlights: Hirofumi Yamaguchi is notably affiliated with Tokyo Electron Limited, a leader in semiconductor and electronics manufacturing equipment. His innovative spirit and technical expertise have driven advancements at the company, solidifying his role as a key contributor in the industry.

Collaborations: Throughout his career, Yamaguchi has collaborated with esteemed colleagues, including Yoshiaki Sasaki and Susumu Kato. Their collective efforts have likely contributed to the success and development of cutting-edge technologies in substrate processing.

Conclusion: Hirofumi Yamaguchi stands out as a significant figure in the world of innovations and inventions. His patents not only reflect his ingenuity but also contribute to the ever-evolving landscape of technology. With continued collaboration and dedication to advancement, Yamaguchi's work promises to leave a lasting impact on the industry.

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