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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9696711 B1

PDFFull Text
Date of Patent:
Jul. 04, 2017

Filed:

Jul. 12, 2012

Processing instructing device, processing instructing method, computer program and processing device

Applicants:

Teruo Asakawa, Tokyo, JP;

Hirofumi Yamaguchi, Nirasaki, JP;

Supika Mashiro, Tokyo, JP;

Toshihiko Iijima, Fuchu, JP;

Hirokazu Narisawa, Fuchu, JP;

Kou Fujimura, Fuchu, JP;

Inventors:

Teruo Asakawa, Tokyo, JP;

Hirofumi Yamaguchi, Nirasaki, JP;

Supika Mashiro, Tokyo, JP;

Toshihiko Iijima, Fuchu, JP;

Hirokazu Narisawa, Fuchu, JP;

Kou Fujimura, Fuchu, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Rothwell, Figg, Ernst & Manbeck, P.C.

Primary Examiner:

Robert Fennema

Assistant Examiner:

Thomas Stevens

Int. Cl.
CPC ...
G06F 19/00 (2011.01); G04F 1/00 (2006.01); H01L 21/00 (2006.01); G05B 19/402 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
G05B 19/402 (2013.01); G05B 19/41865 (2013.01); G05B 2219/2609 (2013.01); G05B 2219/32078 (2013.01); G05B 2219/32272 (2013.01); G05B 2219/32277 (2013.01); G05B 2219/32311 (2013.01); G05B 2219/49202 (2013.01); Y02P 90/14 (2015.11); Y02P 90/20 (2015.11); Y02P 90/28 (2015.11); Y02P 90/285 (2015.11);
Abstract

A processing indicating device to improve the efficiency of processing on an object. The device includes a first communication unit which communicates information with a plurality of processing devices for processing the object and a second communication unit which communicates information with a conveyance controlling device controlling conveying of the object to the plurality of processing devices. An arrival time predicting unit predicts on the basis of information received by the second communication unit, the time when the conveying device arrives at one of the processing devices. In addition, a finish time predicting unit receives information and predicts the time when the processing on the object in the one processing device finishes. A processing indicating unit causes processing control information that orders the execution of device state improvement treatment to be transmitted to the one processing device on the basis of the predicted respective times.

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