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Hikaru Koyama

USPTO Granted Patents = 8

Average Co-Inventor Count = 3.8

ph-index = 3

Forward Citations = 38(Granted Patents)

Location History:

Tokorozawa, JP (2006 - 2007)
Kodaira, JP (2009 - 2020)

Company Filing History:

Hitachi-High-Technologies Corporation

Hitachi High-Tech Corporation

Years Active: 2006-2020

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10840060 - Scanning electron microscope and sample observation method (2020-11-17),

2. 9991092 - Scanning electron microscope and sample observation method (2018-06-05),

3. 7655906 - Method and apparatus for scanning and measurement by electron beam (2010-02-02),

4. 7652248 - Inspection apparatus and inspection method (2010-01-26),

5. 7547884 - Pattern defect inspection method and apparatus thereof (2009-06-16),

6. 7501625 - Electron microscope application apparatus and sample inspection method (2009-03-10),

7. 7276693 - Inspection method and apparatus using charged particle beam (2007-10-02),

8. 7019294 - Inspection method and apparatus using charged particle beam (2006-03-28),

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